ZrB2 Thin Films : Growth and Characterization
Zirconium diboride, ZrB2, is a ceramic material with bulk properties such as high melting point (3245 °C), high hardness (23 GPa), and low resistivity (~8 μΩcm). Thin film growth of ZrB2 using physical vapor deposition has suffered from problems with films deviating from stoichiometry and with high...
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| Format: | Doctoral Thesis |
| Language: | English |
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Linköpings universitet, Tunnfilmsfysik
2016
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-128614 http://nbn-resolving.de/urn:isbn:978-91-7685-833-2 (Print) |