Growth and Characterization of Amorphous Multicomponent Nitride Thin Films
This thesis explores deposition of amorphous thin films based on the two transition metal nitride systems, TiN and HfN. Additions of Si, Al and B have been investigated using three different deposition techniques: dc magnetron sputtering, cathodic arc evaporation, and high power impulse magnetron sp...
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| Format: | Doctoral Thesis |
| Language: | English |
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Linköpings universitet, Tunnfilmsfysik
2014
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-106576 http://nbn-resolving.de/urn:isbn:978-91-7519-337-3 (print) |