Probe measurements in a pulsed high power sputtering magnetron

Probe measurements in a pulsed high power sputtering magnetron

Bibliographic Details
Main Author:	Rasch, Joel
Format:	Others
Language:	English
Published:	KTH, Rymd- och plasmafysik 2007
Online Access:	http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-91546

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