Probe measurements in a pulsed high power sputtering magnetron
| Main Author: | |
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| Format: | Others |
| Language: | English |
| Published: |
KTH, Rymd- och plasmafysik
2007
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-91546 |