Probe measurements in a pulsed high power sputtering magnetron

Probe measurements in a pulsed high power sputtering magnetron

Bibliographic Details
Main Author: Rasch, Joel
Format: Others
Language:English
Published: KTH, Rymd- och plasmafysik 2007
Online Access:http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-91546
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spelling ndltd-UPSALLA1-oai-DiVA.org-kth-915462013-01-08T13:38:27ZProbe measurements in a pulsed high power sputtering magnetronengRasch, JoelKTH, Rymd- och plasmafysik2007Student thesisinfo:eu-repo/semantics/bachelorThesistexthttp://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-91546EES Examensarbete / Master Thesis ; XR-EE-SPP 2007:007application/pdfinfo:eu-repo/semantics/openAccess
collection NDLTD
language English
format Others
sources NDLTD
author Rasch, Joel
spellingShingle Rasch, Joel
Probe measurements in a pulsed high power sputtering magnetron
author_facet Rasch, Joel
author_sort Rasch, Joel
title Probe measurements in a pulsed high power sputtering magnetron
title_short Probe measurements in a pulsed high power sputtering magnetron
title_full Probe measurements in a pulsed high power sputtering magnetron
title_fullStr Probe measurements in a pulsed high power sputtering magnetron
title_full_unstemmed Probe measurements in a pulsed high power sputtering magnetron
title_sort probe measurements in a pulsed high power sputtering magnetron
publisher KTH, Rymd- och plasmafysik
publishDate 2007
url http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-91546
work_keys_str_mv AT raschjoel probemeasurementsinapulsedhighpowersputteringmagnetron
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