Novel concepts for advanced CMOS : Materials, process and device architecture

The continuous and aggressive dimensional miniaturization ofthe conventional complementary-metal-oxide semiconductor (CMOS)architecture has been the main impetus for the vast growth ofIC industry over the past decades. As the CMOS downscalingapproaches the fundamental limits, unconventional material...

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Bibliographic Details
Main Author: Wu, Dongping
Format: Doctoral Thesis
Language:English
Published: KTH, Mikroelektronik och informationsteknik, IMIT 2004
Subjects:
ALD
Online Access:http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-3805