Improved inspection and micrometrology of embedded structures in multi-layered ceramics : Development of optical coherence tomographic methods and tools

Roll-to-roll manufacturing of micro components based on advanced printing, structuring and lamination of ceramic tapes is rapidly progressing. This large-scale and cost-effective manufacturing process of ceramic micro devices is however prone to hide defects within the visually opaque tape stacks. T...

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Bibliographic Details
Main Author: Su, Rong
Format: Doctoral Thesis
Language:English
Published: KTH, Mätteknik och optik 2014
Subjects:
Online Access:http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-144595
http://nbn-resolving.de/urn:isbn:978-91-7595-090-7