Novel RF MEMS Devices Enabled by Three-Dimensional Micromachining

Novel RF MEMS Devices Enabled by Three-Dimensional Micromachining

This thesis presents novel radio frequency microelectromechanical (RF MEMS) circuits based on the three-dimensional (3-D) micromachined coplanar transmission lines whose geometry is re-configured by integrated microelectromechanical actuators. Two types of novel RF MEMS devices are proposed. The fir...

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Bibliographic Details
Main Author: Shah, Umer
Format: Doctoral Thesis
Language:English
Published: KTH, Mikro- och nanosystemteknik 2014
Subjects:
Microelectromechanical systems
MEMS
Radio frequency microelectromechanical systems
RF MEMS
Micromachined transmission line
Micromachining
Tuneable capacitor
Switched capacitor
Coupled-line coupler
Tuneable directional coupler
Intermodulation distortion
MEMS varactor
Two-tone IIP3 measurement
Passive components and circuits
Reliability
Magnetic materials
NiFe multilayer composite
Permeability
Permittivity
Micromachined inductors
Online Access:http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-143757
http://nbn-resolving.de/urn:isbn:978-91-7595-075-4

Internet

http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-143757
http://nbn-resolving.de/urn:isbn:978-91-7595-075-4

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