Preparation and Characterisation of Sputtered Titanium- and Zirconium Nitride Optical Films
Multilayered interference coatings based on titanium- and zirconium nitride and designed for solar control have been prepared using reactive d c magnetron sputtering. Preparation effects and degradation mechanisms were investigated. It was shown that the quality of the nitride strongly depends on th...
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| Format: | Others |
| Language: | English |
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Solid State Physics Group, Department of Technology, Uppsala University
1993
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:fhs:diva-4530 |