The oxygen inductively coupled plasma discharge for spectrochemical analysis

An low-power oxygen ICP discharge has been investigated theoretically and experimentally. Temperature and flow fields have been calculated by computer simulations. The electron temperature and density, intensity ratio of ion line to atom line, and excitation temperature have been measured and compar...

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Bibliographic Details
Main Author: Yang, Pengyuan
Language:ENG
Published: ScholarWorks@UMass Amherst 1987
Subjects:
Online Access:https://scholarworks.umass.edu/dissertations/AAI8805980