Design of a millimeter wave active antenna module using benzocyclobutene and silicon micromachining
A highly integrated millimeter wave active antenna array is implemented using a novel multichip packaging technique. The goal of the new packaging scheme is to allow the implementation of very compact hybrid multi-chip modules using a low cost micro-machined silicon motherboard and benzocyclobutene...
Main Author: | |
---|---|
Language: | ENG |
Published: |
ScholarWorks@UMass Amherst
2004
|
Subjects: | |
Online Access: | https://scholarworks.umass.edu/dissertations/AAI3118288 |