Feasibility of optical gyroscopic sensors in silicon-on-insulator technology
In the last decade, silicon photonics has become a strategic technology for the development of telecommunications and sensors. Due to its compatibility with well-developed complementary metal oxide semiconductor (CMOS) fabrication processes, silicon on insulator (SOI) wafers can be processed to crea...
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| Language: | English |
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University of British Columbia
2015
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| Online Access: | http://hdl.handle.net/2429/54606 |