Design techniques for low-power low-noise CMOS capacitive-sensor readout circuits
In recent years, the demand for low-cost, high performance, and miniature sized MEMS capacitive inertial sensors (accelerometer/gyroscope) has been steadily increasing. Use MEMS capacitive accelerometer as an example, for high precision applications, the resolution needs to be in the μg range at the...
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| Language: | English |
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University of British Columbia
2015
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| Online Access: | http://hdl.handle.net/2429/54529 |