A micromachined inductive sensor using folded flex-circuit structures and its wireless telemetry applications

This thesis reports a flexible, passive wireless inductive sensor with micromachined variable inductors for telemetric applications. The variable inductor is formed by folding coplanar dual spiral coil with 5-10 mm size that are microfabricated using 50-μm-thick copper-clad polyimide film commonly u...

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Bibliographic Details
Main Author: Sridhar, Vijayalakshmi
Format: Others
Language:English
Published: University of British Columbia 2009
Online Access:http://hdl.handle.net/2429/5418