Preparation of thin insulating films by plasma anodization
The plasma anodization of polycrystalline niobium samples has been undertaken using a d.c. glow discharge in oxygen. The apparatus used, which has facilities for in situ ellipsometry measurements and sample temperature control, is described. Anodizations were carried out at various constant current...
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| Language: | English |
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University of British Columbia
2011
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| Online Access: | http://hdl.handle.net/2429/34510 |