Rotary-axial spindle design for large load precision machining applications
Normal stress electromagnetic actuators can be used as both an axial bearing and an in-feed motor in precision machine tool applications that require only millimeter-range axial stroke, such as silicon wafer face grinding or meso-machining. The rotary cutting stage may be integrated with the axially...
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| Language: | English |
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University of British Columbia
2010
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| Online Access: | http://hdl.handle.net/2429/30163 |