Spectroscopic ellipsometry of Palladium thin films

Spectroscopic ellipsometry is a nondestructive, ambient surface analysis technique for studying surfaces, interfaces and thin films. To take advantage of this method an automatic spectroscopic ellipsometer was designed and constructed for the microstructural characterization of thin films. This high...

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Bibliographic Details
Main Author: Sullivan, Brian Thomas
Language:English
Published: University of British Columbia 2010
Subjects:
Online Access:http://hdl.handle.net/2429/27546