Spectroscopic ellipsometry of Palladium thin films
Spectroscopic ellipsometry is a nondestructive, ambient surface analysis technique for studying surfaces, interfaces and thin films. To take advantage of this method an automatic spectroscopic ellipsometer was designed and constructed for the microstructural characterization of thin films. This high...
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Language: | English |
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University of British Columbia
2010
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Online Access: | http://hdl.handle.net/2429/27546 |