GaAs material investigation for integrated circuits fabrication
The primary objective of the work described in this thesis was to study the influence of undoped LEC GaAs substrate material from various suppliers on the performance of ion implanted and annealed active layers. Optical transient current spectroscopy (OTCS) was investigated as a qualification test f...
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| Language: | English |
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University of British Columbia
2010
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| Online Access: | http://hdl.handle.net/2429/25089 |