Kinetic studies of the reaction of gallium arsenide with molecular chlorine and iodine
The GaAs/Cl₂ reaction has been studied at pressures of Cl₂ between 0.10 and 9.0 Torr, and in the temperature range from 90 to 110°C whereas the GaAs/I₂ reaction has been investigated at four temperatures between 270 and 330°C with the I₂ pressure being varied between 0.10 and 1.25 Ton. Both reactio...
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| Format: | Others |
| Language: | English |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/2429/1640 |