Monitoring tiny variations of refractive index inside operated optical elements by polarization-sensitive nanoscale confocal microscopy

碩士 === 國立交通大學 === 照明與能源光電研究所 === 108 === This study uses an advanced confocal microscope to achieve non-invasive optical measurements, In order to pursuit the demand of miniaturization and rapid detection of modern semiconductor industry. This microscope is provided with properties such as horizonta...

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Bibliographic Details
Main Authors: Hsieh, Chi-Sheng, 謝其聲
Other Authors: Chan, Ming-Che
Format: Others
Language:zh-TW
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/braes3

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