Monitoring tiny variations of refractive index inside operated optical elements by polarization-sensitive nanoscale confocal microscopy
碩士 === 國立交通大學 === 照明與能源光電研究所 === 108 === This study uses an advanced confocal microscope to achieve non-invasive optical measurements, In order to pursuit the demand of miniaturization and rapid detection of modern semiconductor industry. This microscope is provided with properties such as horizonta...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2019
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Online Access: | http://ndltd.ncl.edu.tw/handle/braes3 |