Heteroepitaxial Growth and Annealing of DC Reactive Sputtered Titanium Zirconium Nitride on Si (100)
碩士 === 國立交通大學 === 材料科學與工程學系所 === 108 === Titanium Zirconium Nitride (TiZrN) with cubic NaCl structure has been widely applied because it has high melting temperature、high hardness、good biocompatibility and great wear resistance. This thesis studies the epitaxial growth of titanium zirconium nitride...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/6ryt84 |