Electrical properties of zirconium nitride thin films deposited by pulsed DC magnetron sputtering
碩士 === 元智大學 === 化學工程與材料科學學系 === 107 === This study is mainly to study electrical properties of ZrN thin film deposited by pulsed DC reactive magnetron sputtering. There were many studies of ZrN thin film in the past and most of studies focus on mechanical properties. The deposition method of these s...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68jyhu |