construct semiconductor manufacturing monitoring mechanism by using autoencoder and CNN
碩士 === 元智大學 === 工業工程與管理學系 === 107 === Artificial intelligence is one of the major parts in industry 4.0 and has been used in semiconductor manufacturing for a while. In this paper, we presented a smart throughput monitoring mechanism model using the convolutional neural network method, support vecto...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2019
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/5a7327 |