A Study of the Influence of Valve's Design Changes on Number of Particles in a Vacuum Chamber
碩士 === 國立雲林科技大學 === 機械工程系 === 107 === The semiconductor industry has developed at an startling rate in recent years, and almost all of the semiconductor process equipment requires vacuum technology. As semiconductor components continue to be nanosized, the impact of dust on the process becomes more...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/ywu487 |