Depositing Chromium Nitride Film on SK2 Tool Steel at Low Temperature by Utilizing High Power Impulse Magnetron Sputtering
碩士 === 國立虎尾科技大學 === 機械與電腦輔助工程系碩士班在職專班 === 107 === High power impulse magnetron sputtering (HiPIMS) is a novel coating technology. HiPIMS has high impulse voltage range that induces higher current for greater power to increase atomic ionization rate of target material and sputtered ion energy. The de...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/bn35ud |