A Study on the Annealed ZnO Film Deposited onto the p-Si Substrate and its Application on the Heterojunction Diode
碩士 === 國立虎尾科技大學 === 光電工程系光電與材料科技碩士班 === 107 === In this study, using radio frequency magnetron co-sputtering system, zinc oxide thin films and aluminum nitride-zinc oxide co-sputtering thin films were prepared by using zinc oxide and AlN targets respectively. Three structures, namely, undoped zinc o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9z89mc |