Development of a Recurring-diffraction grating interferometer for Measuring Multi-Degree-of-Freedom Displacements and Rotations
碩士 === 國立臺灣科技大學 === 機械工程系 === 107 === In this study, a recurring-diffraction grating interferometer for multi-degree-of-freedom measurement is proposed. The recurring-diffraction type grating interferometer is developed by combining the advantages of heterodyne interferometry, grating interferometry...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/699v7a |