Development of a new piezoelectric galvanometric scanner
碩士 === 國立臺灣科技大學 === 機械工程系 === 107 === This study presents development of a new piezoelectric galvanometric scanner which utilizes a two-layer piezoelectric-driven mirror to explore its dynamic characteristics for laser scanning applications. To this end a coating procedure is developed for a ceramic...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2019
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Online Access: | http://ndltd.ncl.edu.tw/handle/c555aq |