Effects of Fabrication Parameters on the Electrical Properties of Barium titanate Thin Film

碩士 === 國立臺灣大學 === 機械工程學研究所 === 107 === In this thesis, we use three different substrate temperatures of Magnetron radio frequency sputter(Magnetron RF sputter) for sputtering and three different holding temperatures in the rapid thermal process(RTP) for vacuum annealing to prepare the high dielectr...

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Bibliographic Details
Main Authors: Chen-Wei Hu, 胡承維
Other Authors: 廖洺漢
Format: Others
Language:zh-TW
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/adk5j8