Design and Development of a Positioning System Using Piezo-Buzzer Actuator and Capacitive Sensor
碩士 === 國立臺灣大學 === 機械工程學研究所 === 107 === In this thesis, design and develop a single axis positioning system module that can be used to multi-axis stages, and reach to millimeter scale long-range positioning with nanometer resolution. Because of its high resolution and speed, piezoelectric elements ha...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/b99xa6 |