Transparent and Conductive Ga-doped ZnO Micro-patterns Fabricated by Laser-assisted Atmospheric Pressure Plasma Jet and Analysis of Air-quench Effect in the Plasma Jet
碩士 === 國立臺灣大學 === 機械工程學研究所 === 107 === In this study, we use APPJ (Atmospheric Pressure Plasma Jet) to deposit GZO (Gallium doped Zinc Oxdie) films. Advantages of our APPJ system is free of vacuum chamber and is able to deposit high quality transparent conductive thin films in open air. Besides thes...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/rhha4j |