First-Principle Calculation of Novel Channel and Ferroelectric Materials with additional BEOL TDDB Reliability Modeling
博士 === 國立臺灣大學 === 光電工程學研究所 === 107 === In this dissertation, the characteristic of lonsdaleite germanium as the novel channel material and hafnia-based ferroelectric material are investigated. Besides, the failure model of the low-k dielectrics in the back-end-of-line is also discussed. As the devic...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4395f4 |