Capacitive Displacement Sensors with Guard Shields for Piezoelectric Actuator
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 107 === The capacitive displacement sensor with guardshield proposed in this study is applied to a long-stroke piezoelectric actuator. Under the original comb-shape electrode structure, a Guardshield design is applied to both the moving electrodes and the fixed ele...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3kw7zf |