Non-contact measurement of copper-film thickness based on resonant electromagnetic sensor
碩士 === 國立高雄科技大學 === 機械工程系 === 107 === In this study, the non-contact copper film thickness measurement system based on an inductor-capacitor (LC) resonant eddy current sensor is investigated. The layout of driving circuit on printed-circuit board (PCB), computer-based control software, and X/Y motor...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9cgc7z |