Study of the optical and electrical properties of SnO2 multilayer films with doped different elements
碩士 === 國立高雄科技大學 === 機械工程系 === 107 === In this study, RF magnetron sputtering of SnO2 on the glass substrate to form oxide layer with different power was performed first. Then DC sputtering was used to deposit Ti as the intermediate oxide layer to form multilayer film. The multilayer film was then an...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/837sm4 |