Fabrication and Measurement of Piezoelectric Material Based on Zinc Oxide Nanoculumn and Influence of Different Shapes of Resonance Cavity on Acoustic Characters Applied to Hydrophones

• Main Authors: YANG, MENG-ZHE, 楊孟哲
• Other Authors: CHANG, SHUN-HSYUNG
• Format: Others
• Language: zh-TW
• Published: 2019
• Online Access: http://ndltd.ncl.edu.tw/handle/6v9j7a

碩士 === 國立高雄科技大學 === 微電子工程系 === 107 === This paper studies the selection and use of ZnO (Zinc oxide) piezoelectric material due to lower cost and easier process than PZT(piezoelectric ceramic transducer). Firstly, DC sputter system was used for sputtering zinc oxide film as a seed layer on the glass substrate. Then the ZnO seed layer was immersed in zinc nitrate(Zn(NO3)2) and Methenamine(C6H12N4) solution. Immersed ZnO film was put into a heating circulating water bath to heat the surface of the film for growing a zinc oxide nanocolumn structure as a piezoelectric film. Then, we use different curvatures of glass adhering to piezoelectric material to form various sizes of the resonant cavity. In order to find a model that is most suitable for the hydrophone, we measure in the sink and compare the different characteristics. Hydrophones produced by ZnO piezoelectric film frequency response was smoother than B&K8104. The curvature of 5.7 mm-1 resonance cavity with the decimeter of 9.8 mm receives a better signal intensity than other samples.