Fabrication and Measurement of Piezoelectric Material Based on Zinc Oxide Nanoculumn and Influence of Different Shapes of Resonance Cavity on Acoustic Characters Applied to Hydrophones
碩士 === 國立高雄科技大學 === 微電子工程系 === 107 === This paper studies the selection and use of ZnO (Zinc oxide) piezoelectric material due to lower cost and easier process than PZT(piezoelectric ceramic transducer). Firstly, DC sputter system was used for sputtering zinc oxide film as a seed layer on the glass...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/6v9j7a |