Model Refinement for the Classifier of the Spatial Pattern Randomness

碩士 === 國立中央大學 === 電機工程學系 === 107 === In this thesis, we find the relationship between diesize and Boomerang Chart based on wafer map which random distribution of defects, build the model by the relationship that let user just provided diesize to get bound of wafer cause by random defects to achieve...

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Bibliographic Details
Main Authors: Ruei-Syuan Hou, 侯睿軒
Other Authors: Chin Hsia
Format: Others
Language:zh-TW
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/9w48yv