Improved Acceleration Algorithm for the Calculation of the Wafer Map Features
碩士 === 國立中央大學 === 電機工程學系 === 107 === When a problem occurring on a wafer, it can be divided into two kinds of errors, random and systematic. In the study, we use previously proposed boomerang chart to classify the problem of real wafer (WM-811K). With the advancement of technology, the processes are...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/nsvak8 |