Applications of Randomness and Homogeneity Test to Enhance the Systematic Error Resolution for Wafer Map Analysis
碩士 === 國立中央大學 === 電機工程學系 === 107 === The systematic error is hard to distinguish in small diesize wafer. In order to solve the problem, this paper analyze six kinds of symptomatic failure types among the nine kinds of systematic errors. Each of failure types have been cut into different shapes. The...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/w88645 |