Development of InGaAs Fin Field-Effect Transistors Selectively Grown on Patterned Ge Template

碩士 === 國立中央大學 === 電機工程學系 === 107 === Nowadays, Si CMOS manufacturing technology has come to 7 nm technology node and approached its physical limit. New materials that offer high carrier mobility and lead to low power consumption are the focus of research in semiconductor field. For example, III-V co...

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Bibliographic Details
Main Authors: Shan-Chun Hsu, 許善軍
Other Authors: Jen-Inn Chyi
Format: Others
Language:zh-TW
Published: 2019
Online Access:http://ndltd.ncl.edu.tw/handle/em5ydt