Effects of Nitrogen Plasma Treatment on AP-PECVD Fabricated Mg-Doped InGaZnO Channel Thin Film Transistors
碩士 === 國立交通大學 === 國際半導體產業學院 === 107 === The conventional a-Si thin film transistors (TFTs) have some obviously disadvantages, such as high operation voltage, poor subthreshold swing, threshold voltage and processes temperature issues, and lower field-effect mobility, etc. As the required technology...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2019
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/nm56ep |