A Study on the Preparation, Post-Deposition Treatments, and Device Application of ZnON Thin Films
碩士 === 國立交通大學 === 國際半導體產業學院 === 107 === In this thesis, we study ZnON thin films deposited by reactive sputtering and investigate the influence of the N2 flow rate on the film properties. We also evaluate the effects of three kinds of the post-deposition treatments, including the AP thermal annealin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/898gwv |