The Study of Flow Field Investigation and Visualization of Plasma Jet
碩士 === 國立交通大學 === 機械工程系所 === 107 === In modern epitaxial process, film quality heavily depends on the uniformity of the flow field. In our study, flow distribution was visualized using the Atmospheric Pressure Plasma Jet(APPJ). The investigated parameters included applied voltage (4 - 8 kV), reactio...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2019
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| Online Access: | http://ndltd.ncl.edu.tw/handle/d9e6v3 |