CMOS MEMS Variable Inductance Accelerometer with Digital Output
碩士 === 國立交通大學 === 電控工程研究所 === 107 === This thesis proposes an inductive accelerometer with digital output, which is fabricated by TSMC 1P6M 0.18μm CMOS MEMS process. In this design, the LC oscillator is composed of a variable spring-inductor which is connected with a high Q inductor in series and is...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/tkj2m5 |