Influence of Cp2Mg flow rate on the structural,electrical,and optical properties of p-type GaN
碩士 === 國立交通大學 === 電子物理系所 === 107 === In this thesis, the metal organic chemical vapor deposition system (MOCVD) is used to grow P-type gallium nitride on the Si (111) substrate by modulating the flow of Cp2Mg. Investigate its optical, structural, and electrical properties to explore the performance...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2019
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Online Access: | http://ndltd.ncl.edu.tw/handle/etu43c |