A Study on Nickel-Seed Induced Laterally Crystallized Low Temperature Poly-Silicon Nanosheet Thin-Film Transistors
碩士 === 國立交通大學 === 電子物理系所 === 107 === Low temperature poly-silicon thin-film transistors (LTPS TFTs) has higher carrier mobility than amorphous silicon (α-Si). Its low process temperature and CMOS process compatibility makes it suitable for three dimensional integrated circuits (3D-ICs). Conventional...
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| Format: | Others |
| Language: | en_US |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/znfvha |