A Study on Multi-Gate Poly-Si Junctionless and Junctionless Accumulation Mode FinFETs for Monolithic 3-D IC Applications
博士 === 國立交通大學 === 電子物理系所 === 107 === In this dissertation, we have successfully fabricated and demonstrated the n-type multi-gate poly-Si junctionless FinFETs (MG JL FinFETs) and the p-type multi-gate poly-Si junctionless accumulation mode FinFETs (MG JAM FinFETs) without the use of advanced lithogr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/935yfu |