Study on the Preparation and Device Applications of Zinc Oxynitride Films
博士 === 國立交通大學 === 電子研究所 === 107 === In this dissertation, we have successfully prepared high-quality n-type zinc oxynitride (ZnON) films with reactive magnetron sputtering system by properly adjusting ratio of Ar, O2 and N2. We also fabricated and characterized high-performance sub-micron ZnON thin...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/7w7y3b |